Transport Coefficients for Electrons in Mixtures of Ar and HBr
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概要
- 論文の詳細を見る
We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of $E/N$ (electric field $E$ to the gas number density $N$ ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful $E/N$ dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.
- 2007-06-15
著者
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Makabe Toshiaki
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Petrovic Zoran
Institute Of Physics
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Makabe Toshiaki
Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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Sasic Olivera
Institute of Physics, PO Box 68, 11080 Zemun, Belgrade, Serbia
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Dujko Sasa
Institute of Physics, PO Box 68, 11080 Zemun, Belgrade, Serbia
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