Makabe Toshiaki | Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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概要
関連著者
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Makabe Toshiaki
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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MAKABE Toshiaki
Department of Electrical Engineering, Keio University
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Nakano Nobuhiko
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Makabe T
Keio Univ. Yokohama Jpn
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Nakano Nobuhiko
Faculty Of Science And Technology Department Of Electrical Engineering Keio University
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Shibata M
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Shibata Mari
Department Of Dermatology Showa University School Of Medicine
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Oh Jin-sung
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Petrovic Zoran
Institute Of Physics
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Yagisawa Takashi
Department Of Electronics And Electrical Engineering Keio University
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PETROVIC Zoran
Institute of Physics, University of Belgrade
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KAKUTA Shigeru
Department of Electrical Engineering, Keio University
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Makabe Toshiaki
Department Of Electronics And Electrical Engineering Keio University
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Makabe Toshiaki
Department Of Electrical Engineering Keio University
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Kakuta Shigeru
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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KITAJIMA Takeshi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Kitajima Takeshi
Department Of Electrical And Electronic Engineering National Defense Academy
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Shimada Takashi
Department Of Applied Physics School Of Engineering The University Of Tokyo
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Goto Takeshi
Department Of Applied Physics University Of Tokyo
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TAKAHASHI Kei
Department of Food Science and Nutrition, School of Human Cultures, The University of Shiga Prefectu
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KONDO Kenji
Department of Physics, Chiba University
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Oh J‐s
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Petrovic Z
Keio Univ. Yokohama Jpn
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Kuroda H
Univ. Tokyo Tokyo Jpn
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OKABE Yutaka
Department of Physics,Tohoku University
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Kondo K
Fujitsu Laboratories Ltd.
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Nakano Nobuhiko
Department Of Electrical Engineering Keio University
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Tochikubo Fumiyoshi
Department Of Electrical Engineering Tokyo Metropolitan University
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Tochikubo Fumiyoshi
Departmen Of Electrical Engineering Tokyo Metropolitan University
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Kamimura Kazuhiro
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Iyanagi Katumi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Segawa Sumie
Central Research Laboratory, Tokyo Electron Limited
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Kurihara Masaru
Department of Electrical Engineering, Keio University
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Kuroda H
Sci. Univ. Tokyo Chiba Jpn
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KURODA Hidehiko
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Okabe Yutaka
Department Of Applied Chemistry Science And Engineering Waseda University
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Okabe Yutaka
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Makabe Toshiaki
Department Of Electrical Engineering Keio Untversity
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Kurihara Masaru
Department Of Electrical Engineering Keio University
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Segawa Sumie
Central Research Laboratory Tokyo Electron Limited
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Kamimura Kazuhiro
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Iyanagi K
Toshiba Corp. Kanagawa Jpn
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Ohtake Hiroto
Department Of Electrical Engineering Keio University
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Petrovic Zoran
Department Of Electronics And Electrical Engineering Keio University
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Petrovic Zoran
Institute Of Physics University Of Belgrade
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Kakuta S
Department Of Electrical Engineering Keio University
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HASHIDO Ryu-ichi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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YAMAGUCHI Yukio
Yokohama Research Center, Mitsubishi Chemical Corporation
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Hasebe Masao
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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YAMAGUCHI Yukio
Research Center, Mitsubishi Kasei Corporation
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HIOKI Kazuya
Department of Electronics and Electrical Engineering, Keio University
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ITAZU Naoki
Department of Electronics and Electrical Engineering, Keio University
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SHIDOJI Eiji
Research Center, Asahi Glass Co., Ltd.
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Itazu Naoki
Department Of Electronics And Electrical Engineering Keio University
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Hioki Kazuya
Department Of Electronics And Electrical Engineering Keio University
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Shidoji Eiji
Research Center Asahi Glass Co. Ltd.
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Kitajima Takeshi
Dainippon Screen Manufacturing Co. Ltd.
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NAKANO Toshiki
Department of Electrical and Electronic Engineering, National Defense Academy
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Nakano Toshiki
Dep. Of Electrical And Electronic Engineering National Defense Acad.
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Nakano Toshiki
Department Of Electrical And Electronic Engineering National Defense Academy
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Tochikubo F
Tokyo Metropolitan Univ. Tokyo Jpn
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Kondo Kenji
Department Of Electrical Engineering Faculty Of Science And Technology Keio University:fuji Electric
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Takahashi Kei
Department Of Electrical And Electronic Engineering National Defense Academy
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SHIMURA Naohiko
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Shimura Naohiko
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Yamaguchi Yukio
Research Center Mitsubishi Kasei Corporation
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Maeda Kenji
Departent Of Cardiology Kobe General Hospital
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Maeda Kenji
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Kamimura Kazuhiko
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Iyanagi Katsumi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Hosokawa Yoshiyuki
Mechanical Engineering Research Laboratory, KOBE STEEL, Ltd., Takatukadai, Kobe 651, Japan
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Makabe Toshiaki
Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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Makabe Toshiaki
Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Hiyoshi, Yokohama 223, Japan
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Makabe Toshiaki
Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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MAKABE Toshiaki
Department of Electronics and Electrical Engineering, Keio University
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Hasebe Masao
Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Hiyoshi, Yokohama 223, Japan
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Takahashi Kei
Department of Applied Chemistry, School of Science and Engineering, Waseda University
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Hamaoka Fukutaro
Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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Shimada Takashi
Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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Sasic Olivera
Institute of Physics, PO Box 68, 11080 Zemun, Belgrade, Serbia
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Dujko Sasa
Institute of Physics, PO Box 68, 11080 Zemun, Belgrade, Serbia
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Oh Jin-Sung
Department of Electrical Engineering, Faculty of Science and
著作論文
- Influence of Ar Metastable on the Discharge Structure in Ar and N_2 Mixture in RF Discharges at 13.56 MHz ( Plasma Processing)
- Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma
- Dependence of Driving Frequency on Capacitively Coupled Plasma in CF_4
- A Study of the Sustaining Mechanism in an Inductively Coupled Plasma ( Plasma Processing)
- Phase Transitions in DC Discharges in SiH_4
- Optical Emission Spectroscopy of Pulsed Inductively Coupled Plasma in Ar : Nuclear Science, Plasmas, and Electric Discharges
- Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
- Experimental Study of Very-High-Frequency Plasmas in H_2 by Spatiotemporally Resolved Optical Emission Spectroscopy ( Plasma Processing)
- Rare Gas Metastable Atom Density in Diluted O_2 RF Plasmas
- A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
- Effect of Surface Material on Spatiotemporal Structure in O_2 RF Glow Discharge
- The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
- Theoretical Analysis of Electron Velocity Distribution Functions and Transport Coefficients in HCl in a DC Electric Field
- A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen
- A novel sustaining mechanism in capacitively coupled radiofrequency plasma
- Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
- Effects of Plasma Molding on Feature Profile of Silicon Micro-Electro-Mechanical Systems through Flux Ion Velocity Distributions in Two-Frequency Capacitively Coupled Plasma in SF6/O2
- Influence of the Finite Mass-Ratio on the Charged-Particle Transport in Gases
- Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation ( Plasma Processing)
- Measurement of Amount of Pattern Trim and Surface Chemistry for Organic Resist Etching in an Inductively Coupled Plasma in SO2–O2 Gas Mixtures
- Evaluation of Errors in Feedback Control Based on Persistence Prediction in Model-Based Process Controller System for Deep Sub-100 nm Gate Fabrication
- Self-Consistent Modeling of Feature Profile Evolution in Plasma Etching and Deposition
- Modeling of Feature Profile Evolution in SiO2 as functions of Radial Position and Bias Voltage under Competition among Charging, Deposition, and Etching in Two-Frequency Capacitively Coupled Plasma
- Transport Coefficients for Electrons in Mixtures of Ar and HBr
- Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
- A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation