Nakano Nobuhiko | Department Of Electrical Engineering Faculty Of Science And Technology Keio University

スポンサーリンク

概要

関連著者

もっと見る

著作論文

Influence of Ar Metastable on the Discharge Structure in Ar and N_2 Mixture in RF Discharges at 13.56 MHz ( Plasma Processing)
Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma
Dependence of Driving Frequency on Capacitively Coupled Plasma in CF_4
Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
Effect of Surface Material on Spatiotemporal Structure in O_2 RF Glow Discharge
The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen
A novel sustaining mechanism in capacitively coupled radiofrequency plasma
Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor

スポンサーリンク