Nitrogen Atom Densities in Rare Gas Diluted N_2 Plasmas with Capacitive and Inductive Coupling
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概要
- 論文の詳細を見る
Nitrogen atom densities in rare-gas diluted N2 plasmas are diagnosed by using Vacuum Ultra Violet Absorption Spectroscopy (VUVAS). The influence of rare-gas dilution for low pressure (20 mTorr) inductively coupled plasma is that N atom density shows a peak around 3 % of N2 fraction due to the increase of the high energy electrons. The N2 ion density, another precursor for nitridation, did not show a peak even for the high rare-gas fraction. On the other hand, capacitively coupled plasma operated at 0.5 Torr range showed no steep increase of N atom density. The optical diagnostics shows that rare-gas dilution of N2 plasma leads to the change of reactant flux ratio between neutral atoms and ions.
- 社団法人 電気学会の論文
- 2008-10-01
著者
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KITAJIMA Takeshi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Kitajima Takeshi
Department Of Electrical And Electronic Engineering National Defense Academy
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NAKANO Toshiki
Department of Electrical and Electronic Engineering, National Defense Academy
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KUBOTA Akihiro
Department of Electrical and Electronic Engineering, National Defense Academy
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Nakano Toshiki
Department Of Electrical And Electronic Engineering National Defense Academy
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Kubota Akihiro
Department Of Electrical And Electronic Engineering National Defense Academy
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