F-1222 複数音源を用いた非接触超音波マイクロマニピュレーション(S46-2 マイクロ・ナノ作業(2))(S46 マイクロ・ナノ作業)

概要

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Non-contact micromanipulation is one of the fundamental techniques in micromachine technology. This paper describes an advanced technique to manipulate particles one-, two- and three-dimensionally using two, three and four transducers. The transducers are settled with their sound-beam axes crossing at the same point. All transducers are driven at the same frequency, and a standing wave field is generated in the crossing region. When polystyrene particles are poured with a pipette into the sound field, the particles are trapped at the node of the sound pressure in the sound field. When changing the phase of one of the transducers of the three or four used, the trapped particles are transported along the sound beam axis of the transducer. Combining each movement along the four sound beam axes, three-dimensional non-contact manipulation of a particle is accomplished.
一般社団法人日本機械学会の論文
2001-08-22