1A1-C15 変位と力を両立した新型積層圧電アクチュエータ

概要

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We propose the tailor-made multilayer piezoelectric actuator with large displacement and large force. In a past piezoelectric actuator, the achievement of a small, low-cost actuator with large displacement and large force was difficult. We solved these problems by combining two bimorph type piezoelectric elements by the both ends being supported, and accumulating it. Moreover, the ratio of displacement and force of this multilayer piezoelectric actuator can be widely changed by changing the size of bimorph type piezoelectric element. In this study, first, we show the structure of this multilayer piezoelectric actuator. Next, displacement and force of this multilayer piezoelectric actuator were theoretically derived. The analytical results almost corresponded to the experimental results. Next, prototype multilayer piezoelectric actuators were fabricated and evaluated. The evaluation results showed that this multilayer piezoelectric actuator can generate a displacement of several 100 μm or a force of several N within the size of 10×10×10 mm.
一般社団法人日本機械学会の論文