2P1-K09 AT-Cut水晶振動子を用いた荷重センサの評価と温度補償

概要

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The compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external force, and features high sensitivity, high-speed response, a wide measurement range, and superior temperature and frequency stability. Quartz crystal resonators were rarely used in force measurement due to their poor stress concentration during bending. We have developed and characterized a sensor mechanism that safely maintains the quartz crystal resonator. The objective of this study is to improve the resolution of load measurement and to miniaturize the sensor. We designed a novel retention mechanism of the quartz crystal resonator which is fixed vertical to the applied load. The new load sensor was evaluated on the relation between load and resonance frequency as well as temperature and resonance frequency. We also proposed the temperature compensation methods.
一般社団法人日本機械学会の論文
2009-05-25