2P1-D15 オンチップ細胞操作システムに関する研究 : その5:3次元マイクロアクチュエータによる微粒子ローディング(ナノ・マイクロ流体システム)

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In this paper we describe a novel fabrication method of three dimensional polymeric magnetically driven microtools (3D-MMT) for non-intrusive and no contamination experiments on a chip. In order to obtain precise and complicated 3D patterns of 3D-MMT, a grayscale photolithography technique has been applied to thick nega-photoresist with back-side photolithography technique. By controlling an amount of ultraviolet light with a gradation of gray tone mask, we have fabricated smoothly curved (100 μm gap) object without steps unlike a conventional layer by layer photolithography techniques. A wide range of on-chip application of microactuators by 3D-MMT have been proposed to complicated and sensitive motion such as microrotor and microloader, uniquely actuated by a combination of magnetic and fluidic force. The surface of the 3D-MMT was fabricated with a group of spiked pattern to reduce the contact area between poly (dimethylsiloxane) (PDMS) microchannel and PDMS-based 3D MMT.
2008-06-06