Ogura Atsushi | School Of Science And Engineering Meiji University
スポンサーリンク
概要
関連著者
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Ogura Atsushi
School Of Science And Engineering Meiji University
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Kosemura Daisuke
School Of Science And Engineering Meiji University
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LIU Yongxun
National Institute of Advanced Industrial Science and Technology
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MATSUKAWA Takashi
National Institute of Advanced Industrial Science and Technology
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YAMAUCHI Hiromi
National Institute of Advanced Industrial Science and Technology
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ISHIKAWA Yuki
National Institute of Advanced Industrial Science and Technology
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Endo Kazuhiko
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Tsukada Junichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Hayashida Tetsuro
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Sakamoto Kunihiro
National Institute Of Advanced Industrial Science And Technology (aist)
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Kamei Takahiro
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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MASAHARA Meishoku
National Institute of Advanced Industrial Science and Technology
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Tomita Motohiro
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Takei Munehisa
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Nagata Kohki
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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USUDA Koji
Collaborative Research Team Green Nanoelectronics Center, AIST
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Kohno Masayuki
Tokyo Electron At Spa Development Engineering Dept.
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Nishita Tatsuo
Tokyo Electron At Spa Development Engineering Dept.
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Kakemura Yasuto
School Of Science And Technology Meiji University
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Yoshida Tetsuya
School Of Science And Technology Meiji University
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Ohshita Yoshio
Toyota Technological Inst. Nagoya Jpn
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Masahara Meishoku
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Akamatsu Hiroaki
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Ogura Atsushi
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Tezuka Tsutomu
Collaborative Research Team Green Nanoelectronics Center, AIST, Tsukuba, Ibaraki 305-8569, Japan
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ISHII Kenichi
National Institute of Advanced Industrial Science and Technology
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SUZUKI Eiichi
National Institute of Advanced Industrial Science and Technology
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Nakanishi Toshio
Tokyo Electron At Ltd. Hyogo Jpn
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Shimidzu Ryosuke
Photon Design Co. Ltd.
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CHIBA Ichiro
PHOTON Design Corporation
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TANAKA Satoshi
School of Science and Engineering, Meiji University
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Yamasaki Kosuke
School Of Science And Engineering Meiji University
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Yamauchi Hiromi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Masahara Meishoku
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Hashiguchi Hiroki
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Ishikawa Yuki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Iwashita Yuta
School of Science and Technology, Meiji University, Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Kiyota Yuji
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Tachibana Tomihisa
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Usuda Koji
Collaborative Research Team Green Nanoelectronics Center, AIST, Tsukuba, Ibaraki 305-8569, Japan
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Endo Kazuhiko
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Ogura Atsushi
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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KAGOSHIMA Yasushi
Graduate School of Material Science, University of Hyogo
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Ota Hiroyuki
National Institute Of Advanced Industrial Science And Technology
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Fukuda Kazunori
Graduate School Of Science And Technology Niigata University
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HATTORI Nobuyoshi
Semiconductor Technology Academic Research Center
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Matsui Junji
Graduate School of Science, Himeji Inst. of Tech.
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Migita Shinji
National Institute Of Advanced Industrial Science And Technology
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Shimidzu Ryosuke
Photon Design Corporation
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Tsusaka Yoshiyuki
Graduate School Of Material Science University Of Hyogo
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Itaka Kenji
North Japan Research Institute For Sustainable Energy Hirosaki University
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Morita Yukinori
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Kosemura Daisuke
School Of Science And Technology Meiji University
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Chikyow Toyohiro
National Inst. Materials Sci. Ibaraki Jpn
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Ogura Atsushi
School Of Science And Technology Meiji University
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Yoshimaru Masaki
Semiconductor R&d Division Semiconductor Business Group Oki Electric Industry Co. Ltd.
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YAMASAKI Kosuke
School of Science and Engineering, Meiji University
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KAKEMURA Yasuto
School of Science and Technology, Meiji University
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YOSHIDA Tetsuya
School of Science and Technology, Meiji University
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NISHITA Tatsuo
TOKYO ELECTRON AT, SPA Development Engineering Dept.
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NAKANISI Toshio
TOKYO ELECTRON AT, SPA Development Engineering Dept.
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Nakanisi Toshio
Tokyo Electron At Spa Development Engineering Dept.
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ARAFUNE Koji
University of Hyogo
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Matsukawa Takashi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Tsukada Junichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Tsukada Junichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Yamauchi Hiromi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Mizubayashi Wataru
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Masahara Meishoku
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Sakamoto Kunihiro
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Sakamoto Kunihiro
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Hayashi Kazuki
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Liu Yongxun
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Liu Yongxun
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Tomita Naohiro
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Matsukawa Takashi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Matsukawa Takashi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Suzuki Eiichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Chikyow Toyohiro
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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Arafune Koji
University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan
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Migita Shinji
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Ohshita Yoshio
Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Tsusaka Yoshiyuki
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Tsusaka Yoshiyuki
Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan
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Lee Hyun
School of Chemical Engineering and Materials Science, Chung-Ang University, 221 Huksuk-dong, Dongjak-gu, Seoul 156-756, Korea
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Yamaguchi Takuya
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Matsui Junji
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Matsui Junji
Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan
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Nagata Kohki
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Takei Munehisa
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Fukuda Kazunori
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Adachi Tetsuya
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Itaka Kenji
North Japan Research Institute for Sustainable Energy, Hirosaki University, Aomori 030-0813, Japan
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Iwashita Yuta
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Masuda Junichi
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Imai Keita
School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Tajima Michio
The Institute of Space and Astronautical Science (ISAS)/Japan Aerospace Exploration Agency (JAXA), 3-1-1 Yoshinodai, Sagamihara, Kanagawa 229-8510, Japan
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Chikyow Toyohiro
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Endo Kazuhiko
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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O'uchi Shinich
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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O'uchi Shin-ichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Yoshimaru Masaki
Semiconductor Technology Academic Research Center, 3-17-2 Shinyokohama, Kouhoku-ku, Yokohama 220-0033, Japan
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Hattori Nobuyoshi
Semiconductor Technology Academic Research Center, 3-17-2 Shinyokohama, Kouhoku-ku, Yokohama 220-0033, Japan
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Uchida Hidetsugu
Semiconductor Technology Academic Research Center, 3-17-2 Shinyokohama, Kouhoku-ku, Yokohama 220-0033, Japan
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Ogura Atsushi
School of Science and Engineering, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Nishita Tatsuo
Tokyo Electron AT, SPA Development Engineering Department, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Nishita Tatsuo
Tokyo Electron AT, SPA Development Engineering Dept., 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Morita Yukinori
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Kagoshima Yasushi
Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
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Kagoshima Yasushi
Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan
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Hayashida Tetsuro
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Akamatsu Hiroaki
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Kohno Masayuki
Tokyo Electron AT, SPA Development Engineering Department, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Kohno Masayuki
Tokyo Electron AT, SPA Development Engineering Dept., 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Yamasaki Kosuke
School of Science and Engineering, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Ota Hiroyuki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Chiba Ichiro
PHOTON Design Corporation, 24-6 Kamiya 2-chome, Kita-ku, Tokyo 115-0043, Japan
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Sudoh Hiroshi
Gas-Phase Growth Ltd., Koganei, Tokyo 184-0012, Japan
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Machida Hideaki
Gas-Phase Growth Ltd., Koganei, Tokyo 184-0012, Japan
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Ishikawa Yuki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Ishikawa Yuki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Tsukuba, Ibaraki 305-8568, Japan
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Lee Hyun
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Tomita Motohiro
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Sakai Chikako
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Yamamoto Shunsuke
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Urushibata Ko
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Miki Shohei
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Arafune Koji
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Yoshida Haruhiko
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Satoh Shin-ichi
School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Nagasaka Masaya
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Arafune Koji
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Suda Kohei
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Uno Tomohiro
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Miyakawa Tatsuya
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Sawamoto Naomi
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Ishikawa Masato
Gas-phase Growth Ltd., Koganei, Tokyo 184-0012, Japan
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Nakanishi Toshio
Tokyo Electron AT, SPA Development Engineering Department, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Tachibana Tomihisa
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Sameshima Takashi
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Yoshida Haruhiko
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Satoh Shin-ichi
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Kosemura Daisuke
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Kosemura Daisuke
School of Science and Engineering, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Usuda Koji
Green Nanoelectronics Collaborative Research Center, AIST, Tsukuba, Ibaraki 305-8569, Japan
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Guo Ruofeng
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
著作論文
- Material Research on High-Quality Passivation Layers with Controlled Fixed Charge for Crystalline Silicon Solar Cells
- Experimental Study of Physical-Vapor-Deposited Titanium Nitride Gate with An n+-Polycrystalline Silicon Capping Layer and Its Application to 20 nm Fin-Type Double-Gate Metal--Oxide--Semiconductor Field-Effect Transistors
- A Comparative Study of Nitrogen Gas Flow Ratio Dependence on the Electrical Characteristics of Sputtered Titanium Nitride Gate Bulk Planar Metal–Oxide–Semiconductor Field-Effect Transistors and Fin-Type Metal–Oxide–Semiconductor Field-Effect Transistors
- Nitrogen Gas Flow Ratio and Rapid Thermal Annealing Temperature Dependences of Sputtered Titanium Nitride Gate Work Function and Their Effect on Device Characteristics
- UV-Raman Spectroscopy System for Local and Global Strain Measurement in Si
- Characterization of Strain in Si for High Performance MOSFETs
- Study of the Degradation of p–n Diode Characteristics Caused by Small-Angle Grain Boundaries in Multi-Crystalline Silicon Substrate for Solar Cells
- Evaluation of Strained-Silicon by Electron Backscattering Pattern Measurement: Comparison Study with UV-Raman Measurement and Edge Force Model Calculation
- Evaluation of Anisotropic Strain Relaxation in Strained Silicon-on-Insulator Nanostructure by Oil-Immersion Raman Spectroscopy (Special Issue : Solid State Devices and Materials (1))
- Experimental Study of Floating-Gate-Type MetalOxideSemiconductor Capacitors with Nanosize Triangular Cross-Sectional Tunnel Areas for Low Operating Voltage Flash Memory Application (Special Issue : Microprocesses and Nanotechnology)
- Fabrication and Characterization of NOR-Type Tri-Gate Flash Memory with Improved Inter-Poly Dielectric Layer by Rapid Thermal Oxidation (Special Issue : Microprocesses and Nanotechnology)
- Study of Strain Induction for Metal–Oxide–Semiconductor Field-Effect Transistors using Transparent Dummy Gates and Stress Liners
- Characterization of Strain for High-Performance Metal–Oxide–Semiconductor Field-Effect-Transistor
- Evaluation of Strain in Si-on-Insulator Substrate Induced by Si3N4 Capping Film
- Two-Dimensional Anisotropic Lattice Deformation Observed in a Commercially Available Strained-Si Wafer
- Investigation of Phonon Deformation Potentials in Si1-xGex by Oil-Immersion Raman Spectroscopy
- Channel Strain Measurement in 32-nm-Node Complementary Metal--Oxide--Semiconductor Field-Effect Transistor by Raman Spectroscopy
- Improvement of Spatial Resolution in Raman Spectroscopy Selecting Measurement Area by Opaque Material Deposition
- Fabrication of Floating-Gate-Type Fin-Channel Double- and Tri-Gate Flash Memories and Comparative Study of Their Electrical Characteristics
- Experimental Comparisons between Tetrakis(dimethylamino)titanium Precursor-Based Atomic-Layer-Deposited and Physical-Vapor-Deposited Titanium--Nitride Gate for High-Performance Fin-Type Metal--Oxide--Semiconductor Field-Effect Transistors
- Combinatorial Investigation of ZrO2-Based Dielectric Materials for Dynamic Random-Access Memory Capacitors
- Tensor Evaluation of Anisotropic Stress Relaxation in Mesa-Shaped SiGe Layer on Si Substrate by Electron Back-Scattering Pattern Measurement: Comparison between Raman Measurement and Finite Element Method Simulation
- Measurement of Anisotropic Biaxial Stresses in Si
- UV-Raman Spectroscopy System for Local and Global Strain Measurements in Si
- Gate Structure Dependence of Variability in Polycrystalline Silicon Fin-Channel Flash Memories
- Investigation of Phonon Deformation Potentials in Si_Ge_x by Oil-Immersion Raman Spectroscopy
- Structure Analyses of Room Temperature Deposited AlO
- Ge
- Gate Structure Dependence of Variability in Polycrystalline Silicon Fin-Channel Flash Memories (Special Issue : Microprocesses and Nanotechnology)
- Measurement of Anisotropic Biaxial Stresses in Si₁₋xGe[x]/Si Mesa Structures by Oil-Immersion Raman Spectroscopy (Special Issue : Solid State Devices and Materials)