Combinatorial Investigation of ZrO2-Based Dielectric Materials for Dynamic Random-Access Memory Capacitors
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概要
- 論文の詳細を見る
We investigated zirconia (ZrO2)-based material libraries in search of new dielectric materials for dynamic random-access memory (DRAM) by combinatorial-pulsed laser deposition (combi-PLD). We found that the substitution of yttrium (Y) to Zr sites in the ZrO2 system suppressed the leakage current effectively. The metal--insulator--metal (MIM) capacitor property of this system showed a leakage current density of less than 5\times 10^{-7} A/cm2 and the dielectric constant was 20. Moreover, the addition of titanium (Ti) or tantalum (Ta) to this system caused the dielectric constant to increase to {\sim}25 within the allowed leakage level of 5\times 10^{-7} A/cm2. Therefore, Zr--Y--Ti--O and Zr--Y--Ta--O systems have good potentials for use as new materials with high dielectric constants of DRAM capacitors instead of silicon dioxides (SiO2).
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2011-06-25
著者
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Itaka Kenji
North Japan Research Institute For Sustainable Energy Hirosaki University
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Ogura Atsushi
School Of Science And Engineering Meiji University
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Chikyow Toyohiro
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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Adachi Tetsuya
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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Iwashita Yuta
School of Science and Technology, Meiji University, Higashimita, Tama-ku, Kawasaki 214-8571, Japan
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Kiyota Yuji
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Itaka Kenji
North Japan Research Institute for Sustainable Energy, Hirosaki University, Aomori 030-0813, Japan
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Iwashita Yuta
School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan
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Chikyow Toyohiro
Advanced Electric Materials Center, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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