Two-Dimensional Anisotropic Lattice Deformation Observed in a Commercially Available Strained-Si Wafer

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概要

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• The average and local lattice structures of a strained-Si layer and a SiGe layer epitaxially grown on a [001]-oriented Si wafer are evaluated by means of high-resolution X-ray diffractometry using a usual X-ray beam and a highly parallel synchrotron X-ray microbeam. Lattices in the constant composition of the SiGe (CC) layer are greatly disarranged mainly due to an anisotropic lattice tilt feature with respect to the [110] and [$1\bar{1}0$] directions in the surface plane. Although the crystallinity of the strained-Si layer was found to follow directly that of lattice tilt variations in the CC layer, the lattice parameter of the strained-Si layer still has the expected value.

• 2006-11-15

著者

• KAGOSHIMA Yasushi

  Graduate School of Material Science, University of Hyogo

• Fukuda Kazunori

  Graduate School Of Science And Technology Niigata University

• Matsui Junji

  Graduate School of Science, Himeji Inst. of Tech.

• Tsusaka Yoshiyuki

  Graduate School Of Material Science University Of Hyogo

• Ogura Atsushi

  School Of Science And Engineering Meiji University

• Hayashi Kazuki

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Tomita Naohiro

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Tsusaka Yoshiyuki

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Tsusaka Yoshiyuki

  Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan

• Matsui Junji

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Matsui Junji

  Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan

• Fukuda Kazunori

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Ogura Atsushi

  School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki 214-8571, Japan

• Kagoshima Yasushi

  Graduate School of Material Science, University of Hyogo, 3-1-1 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

• Kagoshima Yasushi

  Graduate School and Faculty of Science, Himeji Institute of Technology, 3-2-1 Kouto, Kamigori, Ako, Hyogo 678-1297, Japan

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