Characterization of Strain in Si for High Performance MOSFETs

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• Kosemura Daisuke

  School Of Science And Technology Meiji University

• Kosemura Daisuke

  School Of Science And Engineering Meiji University

• Ogura Atsushi

  School Of Science And Technology Meiji University

• Ogura Atsushi

  School Of Science And Engineering Meiji University

• Kohno Masayuki

  Tokyo Electron At Spa Development Engineering Dept.

• KAKEMURA Yasuto

  School of Science and Technology, Meiji University

• YOSHIDA Tetsuya

  School of Science and Technology, Meiji University

• NISHITA Tatsuo

  TOKYO ELECTRON AT, SPA Development Engineering Dept.

• NAKANISI Toshio

  TOKYO ELECTRON AT, SPA Development Engineering Dept.

• Nishita Tatsuo

  Tokyo Electron At Spa Development Engineering Dept.

• Kakemura Yasuto

  School Of Science And Technology Meiji University

• Yoshida Tetsuya

  School Of Science And Technology Meiji University

• Nakanisi Toshio

  Tokyo Electron At Spa Development Engineering Dept.

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