Characterizing the Channel Backscattering Behavior in Nanoscale Strained Complementary Metal Oxide Semiconductor Field-Effect Transistors

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概要

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• This work investigates the impact of different uniaxial strain polarities on channel backscattering in nanoscale complementary metal oxide semiconductor field-effect transistor (CMOSFET). Two carrier statistics, nondegenerate and degenerate-limited, are employed to extract the channel backscattering ratio, ballistic efficiency, and related backscattering factors. While the channel length scales down and the channel stress level increases further, the modulation of channel backscattering ratio, i.e., improved (degraded) by uniaxial tensile (compressive) strain, becomes more prominent. This observation holds true under both carrier statistics, which implies that the nondegenerate case with simple mathematics can be fairly used for evaluation. In addition, the correlation between strain-enhanced mobility gain and drain current improvement is found to be predicted well by the ballistic efficiency deduced with the nondegenerate carrier statistics.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-11-15

著者

• Huang Tiao-yuan

  Institute Of Electronics National Chiao Tung University

• Lin Horng-chih

  Institute Of Electronics National Chiao Tung University

• Ko Chih-hsin

  Taiwan Semiconductor Manufacturing Company Ltd.

• Ge Chung-hu

  Taiwan Semiconductor Manufacturing Company Ltd.

• Lin Hong-nien

  Institute Of Electronics National Chiao-tung University

• Lee Wen-Chin

  Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, Taiwan, R.O.C.

• Huang Tiao-Yuan

  Institute of Electronics, National Chiao-Tung University, 1001 Ta-Hsueh Rd., Hsinchu 30050, Taiwan, R.O.C.

• Chen Hung-Wei

  Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, Taiwan, R.O.C.

• Lin Hong-Nien

  Institute of Electronics, National Chiao-Tung University, 1001 Ta-Hsueh Rd., Hsinchu 30050, Taiwan, R.O.C.

• Lin Horng-Chih

  Institute of Electronics, National Chiao-Tung University, 1001 Ta-Hsueh Rd., Hsinchu 30050, Taiwan, R.O.C.

• Ko Chih-Hsin

  Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, Taiwan, R.O.C.

• Ge Chung-Hu

  Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, Taiwan, R.O.C.

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