High-Sensitivity Force Detection by Phase-Modulation Atomic Force Microscopy
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概要
- 論文の詳細を見る
Performance of phase-modulation atomic force microscopy (PM-AFM) is investigated to achieve high force sensitivity and high-resolution imaging. PM-AFM detects the phase change of the oscillating cantilever relative to the excitation signal and uses it as the feedback signal. We compare the force sensitivity of PM-AFM with that of amplitude-modulation AFM (AM-AFM) theoretically as well as experimentally. We show that PM-AFM has a better signal-to-noise ratio than AM-AFM. We demonstrate that the electrostatic force images obtained by PM-AFM have clearer contrast than those obtained by AM-AFM.
- Japan Society of Applied Physicsの論文
- 2006-08-25
著者
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Naitoh Yoshitaka
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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Kageshima Masami
Department Of Applied Physics Graduate School Of Engineering Osaka University
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Sugawara Yasuhiro
Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University
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Li Yan
Department Of Applied Chemistry Graduate School Of Engineering Kyushu University
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Kobayashi Naritaka
Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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