Characterization of Micro-Channels Fabricated by In-Water Ablation of Femtosecond Laser Pulses
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概要
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Femtosecond laser pulses are used to drill high-aspect-ratio microchannels from the rear surface of silica glass, which is in contact with water. The relationship between the diameter of the channel and the incident energy of laser pulses is investigated. The diameter of the channel was varied from 2 μm to 50 μm by increasing the energy. The morphology of the entrance and inner walls of the channels was analyzed by scanning electron microscopy. The capillary phenomena in the dead-end microchannels in contact with water are investigated. The realization of circular three-dimensional channels is demonstrated.
- 2004-07-15
著者
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Nishii Junji
Photonics Research Institute Kansai Center National Institute Of Advanced Industrial Science And Tec
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Watanabe Wataru
Department Of Applied Physics Graduate School Of Engineering Osaka University
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ISHIZUKA Tomohiko
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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Iga Yasunobu
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Itoh Kazuyoshi
Department Of Applied Chemistry Faculty Of Engineering & High Technology Research Center Kansai
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Li Yan
Department Of Applied Chemistry Graduate School Of Engineering Kyushu University
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Li Yan
Department of Physics, Peking University, Beijing 100871, China
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Iga Yasunobu
Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Ishizuka Tomohiko
Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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