ペンタセン蒸着膜を用いた縦型・横型有機トランジスタ

概要

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Organic semiconductor transistors are expected for flexible displays, infomation tags, etc. However, organic transistors have some disadvantages of current density and speed of operation, because of their high resistivity and low carrier mobility. To improve their performance, it is valuable to analyze the operation mechanism. We have compared characteristics of lateral- and vertical-type transistors using pentacene evaporated films. The pentacene lateral-type FET characteristics showed large variation due to fabrication parameters such as deposition rate, substrate temperature, and film thickness. It was found that evaporated pentacene thin films have large grain gaps, which disturb carrier flow along the channel formed pentacene film / SiO2 interface direction and make FET characteristics instable. It is assumed that pentacene films are not suitable lateral-type transistors. Accordingly, we have fabricated vertical-type organic static induction transistors (SITs) using pentacene evaporated films. The pentacene SITs show a high speed operation (cut off frequency of 7.5 kHz) at relatively low voltages. Further optimization of SIT structure will improve the device performance.
2003-05-01