117 多層ニッケル電鋳による高強度金型の作製(材料の超精密加工とマイクロ/ナノ加工の動向)

概要

論文の詳細を見る
Nickel electroforming is used as a fabrication technology of micro metal mold including LIGA process. However, neither the strength nor peelability of electroformed nickel is enough. There are several methods to improve strength of the metal mold-alloying, and using additive composition of electroplating bath, for example. In this research, we improved the hardness of the metal mold by electroforming on hard and thin nickel electroplating. We used sodium allylsulfonate as an additive for hard nickel electroplating. The hardness was approximately 600Hv and kept the property after annealing of temperature 250℃. Finally, we fabricated nickel mold has micro pattern and the thickness of 4mm.
社団法人日本機械学会の論文
2007-11-16