ウォーム成形技術のLIGAプロセスへの応用(OS10 次世代アクチュエータのマイクロ・ナノ加工)(OS10 次世代アクチュエータのマイクロ・ナノ加工)

概要

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In recent times in the electric components' market, the development of a cylindrical micro coil has been long awaited. What is missing is an optimized injection molding machine to produce 3 dimensional micro-structures. Simply, conventional machines are too big in size and specification. To meet this requirement, developing a compact high-speed injection molding machine is essential. We proposes a new injection molding system for LIGA process with unscrewing mechanism, which includes peripherals and hybrid injection molding unit Utilizing this worm injection technology, a micro resin worm has been formed: liquid crystal polymer, diameter 0.5 mm, length 1.0 mm, worm profile 10μm and 20μm pitch. For this, the cylindrical micro coil has been successfully fabricated with metallizing process. Besides the its application as a conductance unit we expect this technology can be applied to develop a micro actuator in the future also. This breakthrough will create further possibilities of developing 3 dimensional micro components.
社団法人日本機械学会の論文
2004-04-16