2902 3次元X線リソグラフィ及びメタライズによる円筒型コイルを用いた電磁駆動型アクチュエータの作製(J20-1 次世代アクチュエータシステム(1),J20 次世代アクチュエータシステム)

概要

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Recently, actuators have been required to meet unprecedented needs which cannot be attained by mere improvement of existing actuators. At our laboratory, meanwhile, we have proposed a process to create cylindrical microcoils using Three Dimensional X-ray lithography, warm injection molding and metallization techniques. This wiring technology may offer the possibility to create current paths with a large cross-sectional area and high permissible current values. The objective of this research is to apply the technology to creating small, low-voltage-driven, high-powered solenoid microactuators. We will use the cylindrical coil as an actuator so that we can measure the suction force, make a comparison with the projections of generated force, and thereby conduct further analyses.
一般社団法人日本機械学会の論文
2007-09-07