4102 3次元X線リソグラフィ及びメタライズによる円筒型コイル作製(S67-1 アクチュエータシステム(1),S67 アクチュエータシステム)

概要

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Recently, actuators have been required to meet unprecedented needs which cannot be attained by mere improvement of existing actuators. At our laboratory, meanwhile, we have proposed a process to create cylindrical microcoils using Three Dimensional X-ray lithography, warm injection molding and metallization techniques. This wiring technology may offer the possibility to create current paths with a large cross-sectional area and high permissible current values. The objective of this research is to apply the technology to creating small, low-voltage-driven, high-powered solenoid microactuators. We will use the cylindrical coil as an actuator so that we can measure the suction force, make a comparison with the projections of generated force, and thereby conduct further analyses.
社団法人日本機械学会の論文
2006-09-15