1301 電磁型マイクロアクチュエータの作製と評価(マイクロアクチュエータ,一般講演)

概要

論文の詳細を見る
Recently, microcoils and microactuators are being found in increasingly various fields and in many applications. However, it is difficult to process microscopic current paths of microcoil for electromagnetic actuators. The key technology to realizing practical microcoil and microactuator is micro-fabrication process. We are currently proposing a three- dimensional microcoil fabrication process using X-ray lithography and electroplating techniques, and fabricated a high aspect ratio fixed the width of microcoil lines. In this result, a microcoil consisting of 10 um lines and spaces with an aspect ratio of about 5 can be manufactured. It is expected that microcoil with high aspect ratio can deliver high performance electromagnetic microactuators in spite of miniature size.
一般社団法人日本機械学会の論文
2008-04-20