J1101-1-1 電磁型マイクロアクチュエータ用マイクロコイルの作製(次世代アクチュエータシステム)

概要

論文の詳細を見る
Recently, the demand of micro fabrication such as microactuators, microcoils, sensors, and so on is very increased. Actuators are being found in increasingly various fields. However, miniaturization of electromagnetic type actuators has made little progress since it requires micro fabrication processing and new technologies. In this research, we have fabricated narrow pitch and high aspect ratio microcoil using X-ray lithography and metallization techniques for electromagnetic type actuators. Using these techniques, microcoil consisting of 30 μm lines and spaces with an aspect ratio of about 3 can be manufactured. On the other hand, we tried to fabricate microcoil with diameter of less than 1 mm. It is expected that microcoil with high aspect ratio can deliver high performance in spite of miniature size.
一般社団法人日本機械学会の論文
2009-09-12