116 LIGAプロセスによる微細ラインマイクロコイルの作製(材料の超精密加工とマイクロ/ナノ加工の動向)

概要

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Actuators are being found in increasingly various fields and in many applications. And it is one of the most important parts for machines because it determines its performance. In electromagnetic actuators, the performance of coils is very important. In order to obtain narrow width coil lines, the LIGA process can be used to fabricate nano- and micro-scale structure. In this research, we have fabricated microcoil with high aspect ratio coil lines. By using the LIGA process, a coil consisting of 10μm lines and spaces with an aspect ratio of about 5 can be manufactured. For current paths of microcoil, we succeeded a void-free electroplating method to form into narrow pitch coil lines. It is expected that microcoil with high aspect ratio can deliver high performance in spite of miniature size.
一般社団法人日本機械学会の論文
2007-11-16