2901 高アスペクト比マイクロコイルの作製と評価(J20-1 次世代アクチュエータシステム(1),J20 次世代アクチュエータシステム)

概要

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Microcoils are being found in increasingly various fields and in many applications. The performance of coils essentially depends on inductance and quality factor. In order to obtain narrow width coil lines, the LIGA process can be used to fabricate nano- and micro-scale structure. However, thick photoresist coating is needed to create high aspect ratio structure. In this research, we have coated on metal bar with a thick film of photoresist by means of the dipping method, and fabricated a high aspect ratio fixed the width of microcoil lines. By using the LIGA process, a coil consisting of 10μm lines and spaces with an aspect ratio of about 5 can be manufactured. It is expected that microcoil with high aspect ratio can deliver high performance in spite of miniature size.
社団法人日本機械学会の論文
2007-09-07