3203 マイクロコイルの作製と電磁型アクチュエータへの展開(J22-1 次世代アクチュエータシステム(1),ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Actuators are being found in increasingly various fields. For high performance of actuators, the demand of downsize is increasing. However, miniaturization of actuators has made little progress since it requires micro-fabrication processing and new technologies. In order to obtain narrow pitch microcoil lines, the LIGA process can be used. In this research, we have fabricated narrow pitch and high aspect ratio microcoil using X-ray lithography and metallization techniques. A microcoil consisting of 30 μm lines and spaces with an aspect ratio of about 3 can be manufactured. And, microcoil was mounted on the measurement system to obtain suction force of electromagnetic actuator. It is expected that microcoil with high aspect ratio can deliver high performance in spite of miniature size.
一般社団法人日本機械学会の論文
2008-08-02