1307 誘電体ナノ粒子を用いた小型静電容量式傾斜センサの開発(OS5/OS7-1 ライフサポート/マイクロメカトロニクス(1))

概要

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We have developed a micro capacitive inclination sensor that has an outer dimension of 5mm×5mm×2mm and a linear analog output. This sensor is unique in two ways. Firstly, we have se-lected a method to improve the permittivity of the dielectric oil by mixing it with dielectric nano-particles. This method allows us to achieve miniaturization and high performance of the sensor easily. The second feature is the adoption of a slit structure and a pseudo channel in order to mitigate the influence of the surface tension of the dielectric oil. As a result of evaluation of the sensor, we obtained a linear and analog output within an inclination angle range from 0-45 deg. The detection resolution and the response speed were 0.1 deg or more and 0.79 sec/deg respectively. Based on these achievements, we attained a certain perspective to miniaturize inclination sensors.
一般社団法人日本機械学会の論文
2006-05-28