Evaluation of Optical Absorption Coefficients of a-SiN:H Films by Photothermal Deflection Spectroscopy(PDS) : Photoacoustic Spectroscopy
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概要
- 論文の詳細を見る
- 1986-08-07
著者
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Hata Tomonobu
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
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Hasegawa Seiichi
Department Of Electronics Faculty Of Technology Kanazawa University
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Hatsuda Tsuguyasu
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
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MIYABO Tohru
Department of Electrical and Computer Engineering, Faculty of Technology, Kanazawa University
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Hasegawa Seiichi
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
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Miyabo Tohru
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
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