Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO_2 Interlayer
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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Masuda Yutaka
Department of Agricultural Chemistry, The University of Tokyo
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Sasaki Kimihiro
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
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Sasaki Kimihiro
Department Of Electrical And Computer Engineering Kanazawa University
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Haneda Yohko
Rite
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Hata Tomonobu
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
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Wasa Kiyotaka
Rite
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Masuda Yutaka
Deparmtent Of Cardiovascular Surgery Institute Of Health Biosciences University Of Tokushima Graduat
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Masuda Yutaka
Department Of Electrical And Computer Engineering Kanazawa University
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Hata Tomonobu
Department Of Electrical And Computer Engineering Kanazawa University
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Nakano Shin'ichi
Department Of Electrical And Computer Engineering Kanazawa University
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