Low Temperature Deposition of Oriented C-Axis AlN Films on Glass Substrates by Reactive Magnetron Sputtering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1980-05-05

著者

• Takeda Fumio

  Faculty Of Electrical Engineering Toyama Technical College

• Hata Tomonobu

  Department Of Electrical Engineering Faculty Of Technology Kanazawa University

• Hata Tomonobu

  Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University

• HATA Tomonobu

  Department of Electrical Engineering, Faculty of Technology, Kanazawa University

関連論文

• High Rate and Low Radiation Damage Film Deposition by Compressed Magnetic Field (CMF) Magnetron Sputtering : C-4: THIN FILM DEVICES
• Studies on Positive Ion Behavior in Reactive Sputtering of Yttria-Stabilized Zirconia (YSZ)
• Target for a Pb(Zr,Ti)O_3 Thin Film Deposited at a Low Temperature Using a Quasi-Metallic Mode of Reactive Sputtering
• Evaluation of Optical Absorption Coefficients of a-SiN:H Films by Photothermal Deflection Spectroscopy(PDS) : Photoacoustic Spectroscopy
• Effect of Hydrogen Gas on c-Axis Oriented AlN Films Prepared by Reactive Magnetron Sputtering
• Optical Transmission Modulation Mechanisms Caused by Acoustic Domains in CdS : Physical Acoustics II
• High Rate Deposition of ZnO Film Using Improved DC Reactive Magnetron Sputtering technique : C-2: SURFACE WAVE AND MAGNETIC DEVICES
• Photoacoustic Measurement of CdS by Transparent Transducer Method : Physical Acoustics
• Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO_2 Interlayer
• Observation of Surface Roughness by PAS using Transparent Transducer and Photothermal Deflection Spectroscopy (PDS) : Photoacoustic Spectroscopy
• Propose of New Mixture Target for Low Temperature and High Rate Deposition of PZT Thin Films by Reactive Sputtering
• Growth Dependence of Reactively Sputtered Yttria-Stabilized Zirconia on Si(100), (110), (111) Substrates
• Frequency Spectrum of Acoustic Domain Caused by Variable Rise-Time Pulse : Physical Acoustics II
• Low Temperature Deposition of Oriented C-Axis AlN Films on Glass Substrates by Reactive Magnetron Sputtering
• Evaluation of Si Thin Films by Photothermal Deflection Spectroscopy (PDS)
• The Loss Characteristics of a Semiconductor Travelling Wave Amplifier
• Electrical Properties of Low-Temperature (45O℃) Pb(Zr, Ti)O_3 Films Prepared in Quasi-Metallic Mode by RF Reactive Sputtering
• Analysis of Sputter Process on a New ZrTi+PbO Target System and Its Application to Low-Temperature Deposition of Ferroelectric Pb(Zr, Ti)O_3 Films
• Low-Temperature Fabrication of Pb(Zr, Ti)O_3 Films by RF Reactive Sputtering Using Zr/Ti+PbO Target
• Photoacoustic Spectroscopy of CdS by Transducer Method : Physical Acoustics

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