Analysis of Sputter Process on a New ZrTi+PbO Target System and Its Application to Low-Temperature Deposition of Ferroelectric Pb(Zr, Ti)O_3 Films
スポンサーリンク
概要
- 論文の詳細を見る
An rf reactive sputter deposition technique was adopted to deposit ferroelectric lead zirconate titanate (PZT) thin films from a ZrTi (50%/50%) alloy target combined with PbO pellets. Deposition characteristics including the effects of PbO area ratio were discussed. A new deposition mode called the near-metallic mode were investigated as functions of PbO area ratio and substrate temperature. Excess Pb supply tended to enhance perovskite phase formation. Near-stoichiometric perovskite PZT films were obtained at a substrate temperature as low as 450℃. On the other hand, for a PZT+PbO target, porovskite PZT films were obtained only at temperatures higher than 540℃. Deposition rate of perovskite films from the ZrTi+PbO target was 2-3 times higher than that from the PZT+PbO target.
- 社団法人応用物理学会の論文
- 1996-03-15
著者
-
Sasaki Kimihiro
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
-
Hata Toshio
Electrotechnical Laboratory:tokai University
-
Hata T
Kanazawa Univ. Kanazawa Jpn
-
Hata Tomonobu
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
-
ZHANG WeiXiao
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
-
Zhang Weixiao
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University
関連論文
- High Rate and Low Radiation Damage Film Deposition by Compressed Magnetic Field (CMF) Magnetron Sputtering : C-4: THIN FILM DEVICES
- Studies on Positive Ion Behavior in Reactive Sputtering of Yttria-Stabilized Zirconia (YSZ)
- Determination of Material Thermal Properties Using Photoacoustic Signals Detected by a Transparent Transducer
- Analysis of Pyroelectric Signal in Photoacoustic Spectroscopy Using a Transparent Transducer
- Influence of Piezoelectric and Pyroelectric Effects on Signal of PAS Using a Transparent Transducer : Photoacoustic Spectroscopy and Ultrasonic Imaging
- Theoretical Analysis of Photoacoustic Signal on PAS Using a Transparent Transducer : Photoacoustic Effect and Spectroscopy
- Consideration on PA Signals of Multilayer Structure Measured by PAS Using Transparent Transducer : Photoacoustic Spectroscopy
- Distributed Feed Back Surface Emitting Laser Diode with Multilayered Heterostructure
- GaAs/Al_xGa_As Multilayer Reflector for Surface Emitting Laser Diode
- Evaluation of Multilayer Structure and Depth Profile by PAS Using a Transparent Transducer : Photoacoustic Spectroscopy
- Evaluation of Ion Implantation into Silicon Photoacoustic Spectroscopy using Transparent Transducer Method : Photoacoustic Spectroscopy
- Target for a Pb(Zr,Ti)O_3 Thin Film Deposited at a Low Temperature Using a Quasi-Metallic Mode of Reactive Sputtering
- Hall Mobility of Low-Temperature-Deposited Polysilicon Films by Catalytic Chemical Vapor Deposition Method
- Evaluation of Optical Absorption Coefficients of a-SiN:H Films by Photothermal Deflection Spectroscopy(PDS) : Photoacoustic Spectroscopy
- Optical Transmission Modulation Mechanisms Caused by Acoustic Domains in CdS : Physical Acoustics II
- High Rate Deposition of ZnO Film Using Improved DC Reactive Magnetron Sputtering technique : C-2: SURFACE WAVE AND MAGNETIC DEVICES
- Photoacoustic Measurement of CdS by Transparent Transducer Method : Physical Acoustics
- Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO_2 Interlayer
- Observation of Surface Roughness by PAS using Transparent Transducer and Photothermal Deflection Spectroscopy (PDS) : Photoacoustic Spectroscopy
- Propose of New Mixture Target for Low Temperature and High Rate Deposition of PZT Thin Films by Reactive Sputtering
- Growth Dependence of Reactively Sputtered Yttria-Stabilized Zirconia on Si(100), (110), (111) Substrates
- Frequency Spectrum of Acoustic Domain Caused by Variable Rise-Time Pulse : Physical Acoustics II
- Low Temperature Deposition of Oriented C-Axis AlN Films on Glass Substrates by Reactive Magnetron Sputtering
- Etching Effect of Hydrogen Plasma on Electron Cyclotron Resonance-Chemical Vapor Deposition and Its Application to Low Temperature Si Selective Epitaxial Growth
- Evaluation of Si Thin Films by Photothermal Deflection Spectroscopy (PDS)
- The Loss Characteristics of a Semiconductor Travelling Wave Amplifier
- Electrical Properties of Low-Temperature (45O℃) Pb(Zr, Ti)O_3 Films Prepared in Quasi-Metallic Mode by RF Reactive Sputtering
- Analysis of Sputter Process on a New ZrTi+PbO Target System and Its Application to Low-Temperature Deposition of Ferroelectric Pb(Zr, Ti)O_3 Films
- Low-Temperature Fabrication of Pb(Zr, Ti)O_3 Films by RF Reactive Sputtering Using Zr/Ti+PbO Target
- Study on Differential Photothermal Deflection Spectroscopy (PDS) Considering the Intensity Profile of a Probe Beam
- Photoacoustic Spectroscopy of CdS by Transducer Method : Physical Acoustics