Buried Optical Waveguides of Porous Silicon
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概要
- 論文の詳細を見る
It is demonstrated that the refractive-index-controllable nature of luminescent porous silicon (PS) is directly applicable to the development of a three-dimensionally buried optical waveguide. The PS waveguide is fabricated on a p-type silicon wafer by monolithic processes such as photolithography, ion implantation, anodization, and thermal oxidation. An induced high contrast of refractive indices leads to efficient confinement and propagation of visible light. When the active core layer is partially excited by a He-Cd (325 nm) laser, blue emission is observed from a cleaved facet. The PS waveguide is potentially useful as a component of silicon-based photonic integration.
- 社団法人応用物理学会の論文
- 1998-09-15
著者
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Koshida Nobuyoshi
Department Of Electrical And Electronic Engineering Faculty Of Technology Tokyo University Of Agricu
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Takahashi Morio
Department Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agric
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Araki Minoru
Department Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agric
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Takahashi Morio
Department Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agric
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Koshida Nobuyoshi
Department Of Electrical And Electronic Engineering Faculty Of Technology Graduate School Of Eng. To
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Koshida Nobuyoshi
Department Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agric
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