Characteristics of Thermally Induced Ultrasonic Emission from Nanocrystalline Porous Silicon Device under Impulse Operation
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概要
- 論文の詳細を見る
To clarify the mechanism of thermoacoustic effects in a nanocrystalline porous silicon (nc-PS) device, ultrasonic emission characteristics have been investigated in relation to dynamic behavior. The nc-PS ultrasonic emitter is composed of a surface heater electrode, an nc-PS layer, and a single-crystalline silicon (c-Si) substrate. Due to a completely flat frequency response, this device emits an ideal impulse acoustic output with no reverberations for pulse driving. The relationship between acoustic output and transient surface temperature change can be well interpreted quantitatively by taking the heat capacity of the heater electrode into account. The experimental fact that the transient surface electrode temperature change is induced uniformly over the whole range of the emission area ensures the directivity of the acoustic pulse output.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-04-30
著者
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Honda Yoshiaki
New Product Technologies Development Department Matsushita Electric Works Ltd.
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Watabe Yoshifumi
New Product Technologies Development Department Matsushita Electric Works Ltd.
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Koshida Nobuyoshi
Department Of Electrical And Electronic Engineering Faculty Of Technology Graduate School Of Eng. To
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