Study on Chemical Reactions on the Growing Surface to Control the Structures of μc-Silicon from Fluorinated Precursors
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概要
- 論文の詳細を見る
We investigated the roles of atomic hydrogen in the crystal growth process from fluorinated precursors of SiH_nF_m under the two conditions that are dominated by the surface reaction on the substrate and by the gas phase reaction. Differences in structural morphology of microcrystal were observed by TEM (Transmission Electron Microscopy) measurement, and the dependence of crystal structure and orientation on growth thickness were compared. Furthermore, a slight amount of guest molecules modified the crystal structure effectively and improved the elliptic-shaped crystals in the case of PH_3 doping gas without any post treatment. The shape of the elliptical crystal, especially the length of the longer axis of the crystal, was clearly changed according to the experimental conditions. This behavior appears as the key factor in elucidating the role of doping constituents of P.
- 社団法人応用物理学会の論文
- 1991-10-15
著者
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SHIMIZU Isamu
The Graduate School at Nagatsuta
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SHIRAI Hajime
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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Shimizu I
Osaka Univ. Osaka Jpn
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Shimizu I
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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Shimizu Isamu
Imaging Science And Engineering Laboratory Tokyo Institute Of Technology
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Shirai Hajime
The Graduate School At Nagatsuta Tokyo Institute Of Technology:(present Address) Saitama University
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NAKATA Masami
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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NAKATA Masami
Tokyo Institute of Technology, Graduate School
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SAKAI Akira
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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HANNA Junichi
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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Nakata Masami
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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Hanna Junichi
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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Sakai Akira
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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