Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and Their Transport Properties
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-15
著者
-
神谷 武志
東大工
-
Fortmann C
The Graduate School At Nagatsuta Tokyo Institute Of Technology
-
Shimizu I
Osaka Univ. Osaka Jpn
-
KAMIYA Toshio
Materials and Structures Laboratory, Tokyo Institute of Technology
-
Katase Takayoshi
Aterials And Structures Laboratory Tokyo Institute Of Technology
-
Fortmann Charles
Interdisiplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
-
Shimizu Isamu
Interdisiplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
-
Shimizu I
The Graduate School At Nagatsuta Tokyo Institute Of Technology
-
Shimizu Isamu
Imaging Science And Engineering Laboratory Tokyo Institute Of Technology
-
Kamiya Toshio
Materials And Structures Laboratory Tokyo Institute Of Technology
-
Nakahata Kouichi
The Graduate School At Nagatsuta Tokyo Institute Of Technology
-
RO Kazuyoshi
The Graduate School at Nagatsuta, Tokyo Institute of Technology
-
Nakahata Kouichi
Interdiciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
-
Ro Kazuyoshi
Interdiciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
-
Ro Kazuyoshi
The Graduate School At Nagatsuta Tokyo Institute Of Technology
-
神谷 利夫
Materials And Structures Laboratory Tokyo Institute Of Technology
-
Kamiya Toshio
Kochi Prefectural Industrial Technology Center
関連論文
- 分周ハイブリッドモード同期法によるモノリシック半導体レーザパルス列の安定化と制御
- 33GHzモノリシックモード同期半導体レーザパルス列の非線形光ループミラーによる全光型スイッチング
- サブピコ秒領域での光デバイス制御
- Impaired gastric motility and its relationship to reflux symptoms in patients with nonerosive gastroesophageal reflux disease
- Combination chemotherapy with cisplatin and gemcitabine in malignant peritoneal mesothelioma
- Gastric phenotype signet-ring cell carcinoma of the stomach with multiple bone metastases effectively treated with sequential methotrexate and 5-fluorouracil
- イオン打ち込みを利用したInGaAs/InAlAs量子井戸構造の混晶化
- 5a-G-11 半導体のマイクロ波非線型効果II
- 極低温における縮退型半導体の電気伝導 : 低温
- はじめに ( 量子エレクトロニクスの現状と将来)
- AlGaAs DH LEDの高注入時の発光・変調特性
- 光通信発達の歴史と現状及び将来
- GaAsの発光再結合定数の注入キャリア密度依存性
- 高発光効率半導体結晶の少数キャリア寿命-2-
- 高発光効率半導体結晶の少数キャリア寿命--フォトンリサイクリングの効果
- InGaAsP発光ダイオ-ドの出力飽和と温度特性
- Effect of ursodeoxycholic acid on serum liver enzymes and bile acid metabolism in chronic active hepatitis C virus infection
- Impaired Gastric Motility in Patients with Functional Dyspepsia
- Alteration of the responses of gastric smooth muscle to endothelin in streptozotocin-induced diabetic rats
- Improvement of gastric motility by hemodialysis in patients with chronic renal failure
- Impaired gastric motility and its relationship to gastrointestinal symptoms in patients with chronic renal failure
- Prognostic indicators estimated by ^Tc-GSA in acute liver damage
- Effects of endothelin-1 on the membrane potential and slow waves in circular smooth muscle of rat gastric antrum
- Effects of oral glucose intake on gastric myoelectrical activity and gastric emptying
- Gastric Myoelectrical Activity in Patients with Recurrent Gastric or Duodenal Ulcers
- Gastric Motility in Patients with Recurrent Gastric Ulcers
- Effects of trimebutine maleate on gastric motility in patients with gastric ulcer
- ソリトン圧縮パルスを用いた電気光学サンプリングの解析
- 斜入射配置高効率ゾ-ンプレ-トアレイの試作
- 半導体微細加工技術の光学素子作成への適用--深紫外露光法による回析格子素子の試作
- 半導体レ-ザの多モ-ド理論
- 10.6μにおけるInSbの光伝導III : 量子エレクトロニクス
- 6)ヨーロッパにおけるオプトエレクトロニクス・デバイスの研究の現状(光・フィルム技術研究会(第12回))
- 最先端オプトエレクトロニクス技術の話題をめぐって
- 1977年光IC/ファイバー国際会議
- 光通信デバイスの最近の研究動向から (特集 光通信技術の現状と展望)
- 光源及び光電変換 (′80年代後半の光産業技術展望)
- 2003年度文化功労者 ; 末松安晴氏
- 人と人, 分野と分野をつなぐ光学
- 教育国際化の実験国家オーストラリア--試みと課題
- ITを利用した高等教育の展開--教室外講義,通信教育を中心に
- 高等教育レベルにおける教育評価の進展と課題--電子・情報系を例として
- 大学基礎教育としての光学教育
- ドイツの大学と大学外高等教育機関におけるIT利用新教育支援方策の調査--ニューメディア教育プロジェクト(PT-NMB)
- 超高速フォトニクス
- Micro-Optical Platform for All-Optical Demultiplexing Switch Array
- 高速機能デバイスとしての半導体レーザー
- 2層反射防止膜による1.3μm帯波長可変モード同期半導体レーザ
- 液晶を用いた焦点反転素子とその波面補償システムへの適用 (特集:液晶光学素子とその応用)
- 光インターコネクションに適する光トリガーRS-FF回路
- 並列光相関器による文字認識
- 超短光パルス測定
- 横型pin-PDを用いたSi-OEICの設計
- JTCを用いたサンスクリット文字認識
- 未来の社会を支える科学技術を育てる仕組みは何か
- High-Temperature Thermoelectric Properties of La-Doped Ba_Sr_xSnO_3 Ceramics
- Preparation of Semiconductive La-Doped BaSnO_3 by a Polymerized Complex Method and the Thermoelectric Properties
- Characterization of Tunnel Barriers in Polycrystalline Silicon Point-Contact Single-Electron Transistors
- Carrier Transport across a Few Grain Boundaries in Highly Doped Polycrystalline Silicon : Electrical Properties of Condensed Matter
- マイクロ波フォトニクスの目指すもの
- 並列光演算によるデヴァーナガリ文字認識
- 1.総論 : 化合物半導体デバイスの魅力 (化合物半導体デバイスの最近の動向 : 光波・マイクロ波/ミリ波・超高速ディジタル技術を支えるデバイスの研究開発)
- フェムト秒半導体レーザ
- 外部共振器構造半導体受動モードロックレーザ安定性の研究
- Superconductivity in Epitaxial Thin Films of Co-Doped SrFe_2As_2 with Bilayered FeAs Structures and their Magnetic Anisotropy
- Anion Incorporation-induced Cage Deformation in 12CaO・7Al_2O_3 Crystal
- Function Cultivation of Transparent Oxides Utilizing Built-In Nanostructure
- 23pWH-15 Characterization of Ba(Fe_Co_x)_2As_2 thin films by magnetization, transport and Hall measurements
- Optimization of Transparent Conductive Oxide for Improved Resistance to Reactive and/or High Temperature Optoelectronic Device Processing
- Control of Orientation for Polycrystalline Silicon Thin Films Fabricated from Fluorinated Source Gas by Microwave Plasma Enhanced Chemical Vapor Deposition
- Mechanism of Temperature Dependence of Piezoelectric Properties for Pb(Zr,Ti)O_3
- Fabrication of Polycrystalline Silicon Films from SiF_4/H_2/SiH_4 Gas Mixture Using Very High Frequency Plasma Enhanced Chemical Vapor Deposition with In Situ Plasma Diagnostics and Their Structural Properties.
- Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and Their Transport Properties
- Preparation of Bismuth Silicate Films on Si Wafer by Metalorganic Chemical Vapor Deposition
- High Critical Current Density 4MA/cm^2 in Co-Doped BaFe_2As_2 Epitaxial Films Grown on (La,Sr)(Al,Ta)O_3 Substrates without Buffer Layers
- 光フリップフロップ高感度化の検討
- Fabrication of Solar Cells Having SiH_2Cl_2 Based I-Layer Materials
- Role of Seed Crystal Layer in Two-Step-Growth Procedure for Low Temperature Growth of Polycrystalline Silicon Thin Film from SiF_4 by a Remote-Type Microwave Plasma Enhanced Chemieal Vapor Deposition
- Thermoelectric Properties of P-Type BaSnO_3 Ceramics Doped with Cobalt
- Generation of Ultrashort (〜 65 fs) Pulses from 1.55 μm Gain-Switched Distributed Feedback (DFB) Laser with Soliton Compression by Dispersion Arrangements
- Calculation of Band Structures for Perovskite-Type Crystals Using Discrete Variational Xα Method
- AN ENDOCRINE CELL CARCINOMA WITH GASTRIC-AND-INTESTINAL MIXED PHENOTYPE ADENOCARCINOMA COMPONENT IN THE STOMACH
- Spectrally Narrowed Operation of a Gain-Switched 690 nm GaInP/AlGaInP Fabry-Perot Laser by Self-Seeding Technique
- 超高速光の物理
- 非線形光導波路の可能性 (非線形光導波路材料とデバイス応用)
- 半導体レ-ザ-からの超短パルス発生
- 半導体レーザーを光源とする電気光学サンプリング
- 光ICの超高速エレクトロニクスへの期待 (光集積回路特集号)
- 1990年光学界の進展
- 電気光学サンプリング
- Fiber-Optic Pulse Delay Using Composite Zone Plates for Very Fast Optoelectronics : Waves, Optics and Quantum Electronics
- III 量子エレクトロニクスの応用 : III-2 工学的応用 : 光エレクトロニクスにおけるレーザー物理の課題 ( 量子エレクトロニクスの現状と将来)
- A Blazed Grating Fabricated by Synchrotron Radiation Lithography
- Focusing Characteristics of High-Efficiency Fresnel Zone Plate Fabricated by Deep Ultraviolet Lithography
- Mechanism of Diffuse Phase Transition in Relaxor Ferroelectrics
- Effects of Manganese Addition on Piezoelectric Properties of Pb(Zr_Ti_)O_3
- CARDIOVASCULAR TOLERANCE AND AUTONOMIC NERVOUS RESPONSES IN UNSEDATED UPPER GASTROINTESTINAL SMALL-CALIBER ENDOSCOPY : A COMPARISON BETWEEN TRANSNASAL AND PERORAL PROCEDURES WITH NEWLY DEVELOPED MOUTHPIECE
- Small bile duct involvement in IgG4-related sclerosing cholangitis : liver biopsy and cholangiography correlation
- 超短光パルスを用いた光ディジタル処理 (超高速量子エレクトロニクス) -- (超高速量子井戸光デバイスの展望)
- 第6回レーザおよび光電子工学国際会議(CLEO'86)出席報告