Co/Pd多層膜の表面状態と垂直方向磁気特性の関係(磁気記録)

概要

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The magnetic properties of Co/Pd multilayers seem to be strongly dependent on the surface and interface morphology of the films. Microstructure of the multilayers can be tailored by controlling the process conditions. Effect of two process conditions: (1) changing number of periods and (2) insertion of Pd underlayer, has been studied. In both conditions we have found a common relationship between surface roughness R_a and α(=4π(dM/dH)@H=H_c). Increase of surface roughness caused large decrease of α due to the decoupling of exchange interaction among the grains. In order to confirm the effects of Co and Pd layer roughness, respectively, [Co/Pd]_<20> multilayers were deposited at different Ar gas pressures P_<Ar> for each layer. The M-H characteristics of the films with Pd layers deposited at low P_<Ar> didn't reveal high coecivity H_c. AFM observation clarified that the deposition of Pd layers at high P_<Ar> enhances the surface roughness of the multilayers. It was found that a high P_<Ar> condition during Pd deposition is essential for high H_c.
社団法人日本磁気学会の論文
2004-03-01