Multiple-Quantum-Wire Structures with Good Size Uniformity Fabricated by CH_4/H_2 Dry Etching and Organometallic Vapor-Phase-Epitaxial Regrowth
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概要
- 論文の詳細を見る
- 2003-06-15
著者
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Yagi Hideki
Quantum Nanoelectronics Research Center Tokyo Institute Of Technology
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ARAI Shigehisa
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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Arai S
Quantum Nanoelectronics Research Center Tokyo Institute Of Technology
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YAGI Hideki
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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SANO Takuya
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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MARUYAMA Takeo
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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HAQUE Anisul
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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TAMURA Shigeo
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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MURANUSHI Kengo
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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Yagi H
Konoshima Chemical Co. Ltd.
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Murayama T
Integrated Research Institute Tokyo Institute Of Technology
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