Study of Oxidation of TiSi_2 Thin Film by XPS
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-12-20
著者
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Yagi Hideki
Konoshima Chemical Co. Ltd.
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Yagi H
Konoshima Chemical Co. Ltd.
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Kuroda Tsukasa
The Institute Of Scientific And Industrial Research Osaka University
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NAKAMURA Shogo
The Institute of Scientific and Industrial Research, Osaka University
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Nakamura Shogo
The Institute Of Scientific And Industrial Research Osaka University:kumamoto National College Of Te
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Kuroda T
Waseda Univ. Tokyo Jpn
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Yagyu H
Matsushita Electric Works Ltd. Osaka Jpn
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Iwakuro Hiroaki
Research and Development Department, Shindengen Electric Manufacturing Co., Ltd.
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Iwakuro H
Shindengen Electric Mfg. Co. Ltd. Saitama Jpn
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Iwakuro Hiroaki
The Institute Of Scientific And Industrial Research Osaka University
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Yang Wei
The Institute of Scientific and Industrial Research, Osaka University
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Yagi Hideichi
The Institute of Scientific and Industrial Research, Osaka University
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Kuroda T
Institute Of Scientific And Industrial Research Osaka University
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Yang Wei
The Institute Of Scientific And Industrial Research Osaka University:the East China Engineering Inst
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Nakamura Shogo
The Institute Of Scientific And Industrial Research Osaka University
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