A Tip Approach System for a Scanning Tunneling Microscope Using an Inchworm
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概要
- 論文の詳細を見る
We have developed an approach system for a scanning tunneling microscope, which provides approaches without tip crashing and with high immunity from vibrations. A commercial inchworm has been employed in this system and a controller has been developed to drive both the inchworm and the Z section of the piezoelectric scanner in such a manner as to avoid tip crashing caused by large glitches of the inchworm.
- 社団法人応用物理学会の論文
- 1993-11-15
著者
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Kuroda T
Waseda Univ. Tokyo Jpn
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Kuroda Tatsuaki
Toshiba R&d Center
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Tanaka Kuniyoshi
Toshiba R&d Center
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WATANABE Miyoko
Toshiba R&D Center
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Watanabe M
Toshiba Corp. Kawasaki Jpn
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Watanabe Miyoko
Toshiba R & D Center
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