Effect of Film Thickness on Electrical Properties of Chemical Solution Deposition-Derived Pb(ZrxTi1-x)O3/LaNiO3/Si
スポンサーリンク
概要
- 論文の詳細を見る
Pb(ZrxTi1-x)O3 (PZT) thin films with different thicknesses and compositions near the morphotropic phase boundary (MPB) were deposited on a pseudocubic LaNiO3 (LNO) thin film electrode by chemical solution deposition (CSD) in order to elucidate effect of film thickness on the electrical properties of the resultant PZT thin films. The crystal symmetry of the resultant PZT thin films changed from tetragonal to rhombohedral with increasing PbZrO3 concentration as well as with increasing film thickness or decreasing residual stress in the film. The residual stress and the lattice constants were measured by Raman spectroscopy and from X-ray diffraction patterns of the PZT thin films with different thicknesses and compositions, respectively. As a result, compressive residual stress was confirmed from the change in the lattice constants along $a$- and $c$-axes. In addition, residual stress increased with decreasing film thickness, which shifted the MPB composition toward the Zr-rich composition, depending on the film thickness.
- 2007-10-30
著者
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Fukazawa Hiroaki
Graduate School of Science and Technology, Shizuoka University
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Suzuki Hisao
Graduate School Of Sci. And Technol. Shizuoka Univ.
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Wakiya Naoki
Department Of Materials Science And Chemical Engineering Shizuoka University
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Shinozaki Kazuo
Graduate School of Materials Science and Technology, Shizuoka University
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Wakiya Naoki
Department of Materials Science, Shizuoka University, Hamamatsu 432-8561, Japan
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Kosec Marija
Electronic Ceramics Department, Jozef Stefan Institute, 39 Jamova, Ljubljana SI-1000, Slovenia
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Sakamaki Yoshihiro
Graduate School of Science and Engineering, Shizuoka University, Hamamatsu 432-8561, Japan
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Ohno Tomoya
Electro Ceramics Department, Jožef Stefan Institute, Jamova, 39, SI-1000 Ljubljana, Slovenia
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Kosec Marija
Electro Ceramics Department, Jožef Stefan Institute, Jamova, 39, SI-1000 Ljubljana, Slovenia
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Ohno Tomoya
Electro Ceramics Department, Jožef Stefan Institute, Jamova, 39, SI-1000 Ljubljana, Slovenia
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Fukazawa Hiroaki
Graduate School of Science and Engineering, Shizuoka University, Hamamatsu 432-8561, Japan
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Shinozaki Kazuo
Graduate School of Science and Engineering, Tokyo Institute of Technology, Tokyo 152-8550, Japan
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