Thickness Dependence of Residual Stress in Alkoxide-Derived Pb(Zr0.3Ti0.7)O3 Thin Film by Chemical Solution Deposition
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概要
- 論文の詳細を見る
Ferroelectric thin films of Pb(Zr0.3Ti0.7)O3 (PZT30) with different thicknesses were deposited on a Pt/Ti/SiO2/Si substrate by chemical solution deposition (CSD). The residual stress in the PZT30 thin films was estimated by the phonon mode shift of Raman scattering. The stress dependence of the optical phonon mode of ferroelectric tetragonal PZT30 was calibrated by a gasketed diamond anvil cell (DAC) system. As a result, the A(2TO) mode for PZT30 was downshifted at a rate of 13.9 cm-1/GPa. By using this calibration result, the residual stress in the PZT30 thin films with different thickness was estimated. The residual stress in PZT30 thin films increased with decreasing film thickness and reached approximately 1.14 GPa in the case of a film 280 nm thick. Moreover, the residual stress in the PZT30 thin films was compared with that of a lead titanate (PT) thin film to discuss the origin of the residual stress.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-09-30
著者
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Ohno Tomoya
Department Of Dermatology Shimane Medical University
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ISHIKAWA KENJI
Faculty of Policy Management, Yokkaichi University
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Suzuki Hisao
Graduate School Of Sci. And Technol. Shizuoka Univ.
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Matsuda Takeshi
Department Of Cardiology School Of Medicine Kanazawa Medical University
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Ohno Tomoya
Department of Materials Science, Kitami Institute of Technology, 165 Kouen-cho, Kitami, Hokkaido 090-8507, Japan
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Matsuda Takeshi
Department of Materials Science, Kitami Institute of Technology, 165 Kouen-cho, Kitami, Hokkaido 090-8507, Japan
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