PLD法により作製したNi-Znフェライト薄膜の磁気特性に及ぼす組成,結晶性の影響(<特集>セラミックスインテグレーション)

概要

論文の詳細を見る
Epitaxial (Ni-Zn) Fe_2O_4 thin film was prepared on Si (001) substrates using (MgO-Al_2O_3) /CeO_2/YSZ triple buffer layer. In this work, to increase remanent magnetization (M_r) and decrease coercive field (H_c), for epitaxial (Ni-Zn) Fe_2O_4 thin film, the effect of substrate temperature, oxygen pressure and composition on the magnetic properties was examined. It was clarified that the remanent magnetization and coercive field were strongly influenced by temperature and oxygen pressure. In order to obtain high Mr and low H_c, it was thought that a substrate temperature of 800℃ and oxygen pressure 1.3 Pa were optimal conditions. As regarding the composition, M_r could be obtained to a maximum of 3.96 × 10^<-1> Wb/m^2 changing the quantity of Zn and Fe (M_8=5.31 × 10^-1 Wb/m^2, H_c= 1.35 × 10^1 kA/m).
社団法人日本セラミックス協会の論文
2002-05-01