超微粒子窒化アルミニウム粉末の焼結

概要

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Low temperature sinterability of AIN powders with different particle sizes was examined using Y_20_3 as a sintering additive. Samples used in this paper were plasma nitridation AIN with 0.09μm, metal nitridation AIN with 1.2μm, and carbothermal reduction and nitridation with 0.7 and 2.0μm in diameter. Fine powder with higher specific surface area showed higher sinterability at relatively low sintering temperature. Plasma nitridation powder showed excellent sintering behavior with 90% of theoretical density of AIN at 1600℃. No liquid phase formation was observed in the sample sintered between 1400 and 1700℃ with addition of Y_20_3. Processing parameters, i. e., solvent kinds for mixing or amount of binder addition strongly affected the sinterability of AIN in the case of plasma nitridation powder. Low temperature sintering without liquid phase formation needs careful powder processing to control the agglomeration and oxygen contents.
東京工芸大学の論文
1996-01-31