S0405-1-4 収差補正電子顕微鏡によるセラミック薄膜の界面構造解析(セラミックス/セラミックス基礎合材料I)

概要

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It has been analyzed with transmission electron microscopy that the nanostructure of ZrO_2 ultra-thin layer without any rare-earth oxide. Nano-sized monoclinic particles were coherently precipitated in the tetragonal matrix with the interface along {100}, {010} and {110} planes of monoclinic precipitates. The monoclinic phase had the coherent interface between tetragonal matrixes without misfit dislocation. The atomic resolution image around a tetragonal-monoclinic phase boundary and the profile of the projected Zr-Zr and 0-0 distance across the phase boundary as a function of atomic columns indicated that the transition layer of about 1.8nm existed along the phase boundary. The projected Zr-Zr and O-O distances showed the gradual changes across the transition layer. The tetragonal phase had the tetragonality of 1.026, which is larger than the early data. Thus, the transition layer would relax the large strain owing to the phase transition, and the film is strained in the in-plane direction, which would control the phase transition.
2009-09-12