Oxygen Sensing Properties of SrTiO3 Thin Films
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概要
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The oxygen sensing properties of SrTiO3-based thin films have been investigated at room temperature. First, nondoped SrTiO3 was investigated. Although such a material is highly sensitive, its electrical resistance was too high and not feasible for practical use. Donor (Nb5+) could lower the resistance of SrTiO3; however, the sensitivity was lost. UV-light irradiation or t2-type acceptor (Cr3+) doping could lower the resistance and yet maintain the sensitivity. In contrast to t2-type acceptor doping, e-type acceptor (Fe3+) doping could lower the resistance; however, the sensitivity was lost. In this paper, we discuss the phenomena from the viewpoint of polaron-controlled carrier conduction.
- 2008-09-25
著者
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HARA Toru
Development Planning Division, Taiyo Yuden Co., Ltd.
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ISHIGURO Takashi
Development Planning Division, Taiyo Yuden Co., Ltd.
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Shinozaki Kazuo
Department Of Biology Faculty Of Science Osaka University
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Wakiya Naoki
Department Of Materials Science And Chemical Engineering Shizuoka University
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Wakiya Naoki
Department of Materials Science, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan
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Shinozaki Kazuo
Department of Metallurgy and Ceramics Science, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8550, Japan
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Hara Toru
Development Planning Division, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan
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Ishiguro Takashi
Development Planning Division, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan
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