Annealing Effects on Sensitivity of Atomic-Layer-Deposited SrTiO3-Based Oxygen Sensors
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概要
- 論文の詳細を見る
Semiconductive dielectric SrTiO3-based thin films are promising candidates for in situ monitoring of trace levels of oxygen in semiconductor or organic light-emitting diode (LED) display manufacturing processes. SrTiO3-based thin films, which are deposited by atomic-layer deposition (ALD), exhibit high sensitivity to oxygen at room temperature; however, the sensitivity can be affected by SrO-based surface segregation. In this study, we will show that annealing temperature and time are the key parameters for decreasing the coverage of oxygen-insensitive SrO-based surface segregation.
- 2010-09-25
著者
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Hara Toru
Corporate Technol. Planning Dep. Res. And Dev. Lab. Taiyo Yuden Co. Ltd.
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Shinozaki Kazuo
Department Of Biology Faculty Of Science Osaka University
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ISHIGURO Takashi
Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd.
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Hara Toru
Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd., 8-1 Sakaecho, Takasaki, Gunma 370-8522, Japan
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Shinozaki Kazuo
Department of Metallurgy and Ceramics Science, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8550, Japan
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