Borosilicate glasses with high softening points for glass-ceramic/copper multilayer substrates
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概要
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We have developed borosilicate glasses with high softening points for glass-ceramic / copper multilayer substrates. The softening points of this glass ranged from 900℃ to 1000℃. Glass-ceramics made using this glass barely sintered below 850℃, but sintered compactly at temperatures just below 1050℃. Green sheets made using this glass-ceramics could be fired around 850℃ to remove the binder. Binder removal was caused very fast at this temperature. The glass-ceramics could be co-sintered with copper and had various advantages, such as easy binder removal, a coefficient of thermal expansion approximately equal to that of silicon, a low dielectric constant, sufficient flexural strength, and high water durability. These advantages helped make the manufacturing process of the substrate more productive.
- 社団法人日本セラミックス協会の論文
- 2008-04-01
著者
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SHINOZAKI Kazuo
Department of Metallurgy and Ceramics Science
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Shinozaki Kazuo
Department Of Metallurgy And Ceramics Science Tokyo Institute Of Technology
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OKAMOTO Masahide
Production Engineering Research Laboratory, Hitachi Ltd.
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ISHIHARA Shosaku
Production Engineering Research Laboratory, Hitachi Ltd.
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TANEI Hirayoshi
Industrial Property Cooperation Center
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IWANAGA Shoichi
Production Engineering, Research Laboratory, Hitachi Ltd.
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NAKAMURA Masato
Production Engineering, Research Laboratory, Hitachi Ltd.
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TAGAMI Fumikazu
Hitachi Global Storage Technologies
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Shinozaki Kazuo
Department Of Biology Faculty Of Science Osaka University
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Okamoto Masahide
Production Engineering Research Laboratory Hitachi Ltd.
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Iwanaga Shoichi
Production Engineering Research Laboratory Hitachi Ltd.
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Ishihara Shosaku
Production Engineering Research Laboratory Hitachi Ltd.
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Nakamura Masato
Production Engineering Research Laboratory Hitachi Ltd.
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SHINOZAKI Kazuo
Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology
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