SrTiO3-Based Microfabricated Oxygen Sensors

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概要

• 論文の詳細を見る

• Semiconductive dielectric SrTiO3-based thin films are promising candidates for monitoring trace levels of oxygen during in situ monitoring of semiconductor manufacturing processes. In our preliminary studies, it was confirmed that SrTiO3-based thin films have a high oxygen sensitivity of ppb order at room temperature. In this paper, we will show that the prototype SrTiO3-based oxygen sensor detects trace levels of oxygen, even at ppb concentrations. It is expected that the SrTiO3-based sensor can be used for the real-time monitoring of residual oxygen in the future.

• 2009-09-25

著者

• Hara Toru

  Corporate Technol. Planning Dep. Res. And Dev. Lab. Taiyo Yuden Co. Ltd.

• ISHIGURO Takashi

  Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd.

• Hara Toru

  Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan

関連論文

• SrTiO3-based sensors for in situ monitoring of trace levels of oxygen
• Doping effect of Dy on leakage current and oxygen sensing property of SrTiO3 thin film prepared by PLD
• Aging effect on oxygen-sensitive electrical resistance of SrTiO3 thin films
• Ultraviolet-Light-Induced Desorption of Oxygen from SrTiO3 Surfaces
• Annealing Effects on Sensitivity of Atomic-Layer-Deposited SrTiO3-Based Oxygen Sensors
• SrTiO3-Based Microfabricated Oxygen Sensors
• Aging Effect on Oxygen-Sensitive Electrical Resistance of SrTiO3 Thin Films

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