Structural Characterization of a Mo/Ru/Si Extreme Ultraviolet (EUV) Reflector by Optical Modeling

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概要

• 論文の詳細を見る

• The performance of a multilayer extreme ultraviolet (EUV) reflector has a direct bearing on process throughput and the cost of new technology. Using measured data from an experimentally manufactured reflector, we intend, in this work, to show that the reflectivity of the Bragg reflector can be characterized by using structural parameters such as the $d$-spacing, density, thicknesses of the interdiffusion layers and oxidation layer. This quantitative analysis of the reflectivity derived from the structural parameters can be utilized to optimize the optical properties of the existing Mo/Ru/Si system and to provide fundamental insights into the science involved in a Bragg EUV reflector.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• Ahn Jinho

  Department Of Materials Engineering Graduate School Of Advanced Materials And Chemical Engineering H

• KANG In-Yong

  CPRC, Department of Ceramic Engineering, Hanyang University

• CHUNG Yong-Chae

  CPRC, Department of Ceramic Engineering, Hanyang University

• Kim Tae

  Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University

• Lee Seung

  Department Of Anesthesiology And Pain Medicine Dong-a University Hospital

• Ahn Jinho

  Department of Materials Science & Engineering, Hanyang University, Seoul 133-791, Korea

• Ahn Jinho

  Department of Material Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea

• Lee Seung

  Department of Materials Science & Engineering, Hanyang University, Seoul 133-791, Korea

• Kim Tae

  Department of Materials Science & Engineering, Hanyang University, Seoul 133-791, Korea

• Kim Tae

  Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea

• AHN Jinho

  Department of Computer Science, Kyonggi University

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