High Transmittance SiC Membrane Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition in Combination with Rapid Thermal Annealing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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LEE Seung
Department of Dermatology and Human Barrier Research Institute, Yonsei University College of Medicin
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AHN Jinho
Department of Materials Science and Engineering, Hanyang University
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Ahn Jinho
Department Of Materials Engineering Hanyang University
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Ahn Jinho
Department Of Materials Engineering Graduate School Of Advanced Materials And Chemical Engineering H
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Kim Jiyoung
School Of Metallurgical And Materials Engineering Kookmin Unversity
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Song Ki
Lg Corporation Institute Of Technology
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Lee Seung
Department Of Materials Engineering Hanyang University
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SON Joo-Hiuk
Department of Physics, University of Seoul
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Son Joo-hiuk
Department Of Physics University Of Seoul
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Kim Jiyoung
School Of Metallurgical And Materials Engineering Kookmin University
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Lee Seung
Department Of Anesthesiology And Pain Medicine Dong-a University Hospital
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Son J‐h
Univ. Seoul Seoul Kor
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Ahn Jinho
Department of Material Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
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AHN Jinho
Department of Computer Science, Kyonggi University
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