Low Dielectric Constant Fluorinated Oxide Films Prepared by Remote Plasma Chemical Vapor Deposition

スポンサーリンク

概要

• 論文の詳細を見る
• 1996-02-01

著者

• LEE Seung

  Department of Dermatology and Human Barrier Research Institute, Yonsei University College of Medicin

• Jeong Jee-Won

  Electronic Materials and Devices Research Center Korea Institute of Science and Technology

• Jang Jin

  Department of Physics, Kyunghee University Hoigi-dong

• Park M

  Micro Electronics Technology Lab. Electronics And Telecommunications Research Institute

• Jang Jin

  Department Of Physics Kyunghee University

• Jang Jin

  Department Of Biochemistry School Of Medicine Kyungpook National University

• Park Min

  Semiconductor Div., Electronics and Telecommunications Research Institute

• Bark Jong

  Semiconductor Division Electronics And Telecommunications Research Institute

• Park Kyu

  Department Of Physics Kyung Hee University

• Jang J

  Kyunghee Univ. Seoul Kor

• Park Kyu

  Department Of Eecs

• Jang J

  Korea Institute Of Science And Technology

• Lee Seung

  Department Of Anesthesiology And Pain Medicine Dong-a University Hospital

• Lee S

  Department Of Physics Kyung Hee University

• Park Kyu

  Department Of Agrobiology Kangweon National University

関連論文

• Electrooptic Characteristics of the Fringe-Field Switching Device with Electrode on Top Substrate(Optical Properties of Condensed Matter)
• Retinyl retinoate induces hyaluronan production and less irritation than other retinoids
• Monolithic L-band CMOS LNAs Performance With the Ground Patterned Spiral Inductors
• Suppression of Third-Order Intermodulation Distortion Signals by Novel Methods
• Monolithic L-band CMOS LNAs Performance With the Ground Patterned Spiral Inductors
• Suppression of Third-Order Intermodulation Distortion Signals by Novel Methods
• Monolithic L-band CMOS LNAs Performance With the Ground Patterned Spiral Inductors
• Suppression of Third-Order Intermodulation Distortion Signals by Novel Methods
• Vacuum Packaging Using Anodic Bonding and Emission Characteristics of FED (第5回日韓台中情報ディスプレイ合同研究会(ASID '99)) -- (FED and EL Displays)
• Vacuum Packaging using Anodic Bonding and Emission Characteristics of FED
• Novel Bonding Technology for Hermetically Sealed Silicon Micropackage
• Improvement of Electron Emission Stability of Mo-tip FEAs by DLC Coating
• Reflective Display Associated With In-Plane Rotation of Nematic Liquid Crystal : Optics and quantum Electronics
• The Additive Effects of Minoxidil and Retinol on Human Hair Growth in Vitro(Molecular and Cell Biology)
• Bleaching Phototrichogram : An Improved Method for Hair Growth Assessment
• MUTATIONS OF THE TYROSINASE GENE IN THREE KOREAN PATIENTS WITH TYPE I OCULOCUTANEOUS ALBINISM
• Flow control of circular cylinder with a V-grooved micro-riblet film
• Sublingual Foregut Cyst
• Juxta-clavicular beaded lines
• (111) Twins in BaTiO_3 Thin Films Deposited by RF Magnetron Sputtering
• A Phase-Adaptive Garbage Collector Using Dynamic Heap Partitioning and Opportunistic Collection
• Liquid Crystal Alignment Capability by the UV Alignment Method in a-C:H Thin Films
• Telomere length and the risk of lung cancer
• Comprehensive assessment of P21 polymorphisms and lung cancer risk
• Highly Anisotropic Etching of Tungsten-Nitride for an X-Ray Mask Absorber with an Inductively Coupled Plasma System
• Gasless Endoscopic Thyroidectomy Using Trans-axillary Approach ; Surgical Outcome of 581 Patients
• Thin PDP Packaging Technology in Low Temperature and Emission Characteristics (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
• Thin PDP Packaging Technology in Low Temperature and Emission Characteristics
• Fabrication and Characterization of Silicon Field Emission Cathodes using Spin-on-Glass Etch-back Process
• Fabrication and Characterization of Silicon Field Emission Cathodes using Spin-on-Glass Etch-back Process
• Akinetic Mutism Responsive to Bromocriptine Following Subdural Hematoma Evacuation in a Patient With Hydrocephalus : Case Report
• Spinal Subdural Hematoma Following Intracranial Aneurysm Surgery : Four Case Reports
• Increased K-ras mutation and expression of S100A4 and MUC2 protein in the malignant intraductal papillary mucinous tumor of the pancreas
• Carbon-Nanotubes for Full-Color Field-Emission Displays
• Core fucosylation of E-cadherin enhances cell-cell adhesion in human colon carcinoma WiDr cells
• A High-Performance Polycrystalline Silicon Thin-Film Transistor Using Metal-Induced Crystallization with Ni Solution
• Structural Characterization of a Mo/Ru/Si Extreme Ultraviolet (EUV) Reflector by Optical Modeling
• Analysis of Multilayer Structure for Reflection of Extreme-Ultraviolet Wavelength
• Tumor necrosis factor-α enhances DMSO-induced differentiation of HL-60 cells through the activation of ERK/MAPK pathway
• PERFORMANCE IMPROVEMENT OF A-SI TFT PRODUCED BY ATMOSPHERIC PRESSURE CVD : TFT TECHNOLOGIES
• Calcium and neostigmine antagonize gentamicin, but augment clindamycin-induced tetanic fade in rat phrenic nerve-hemidiaphragm preparations
• A New Fabrication Method of Silicon Field Emission Cathodes with Sub-halfmicron Gate Apertures
• A New Fabrication Method of Silicon Field Emission Cathodes with Sub-halfmicron Gate Apertures
• EFFECT OF Cl INCORPORATION ON THE PERFORMANCE OF AMORPHOUS SILICON THIN FILM TRANSISTOR
• Low Dielectric Constant Fluorinated Oxide Films Prepared by Remote Plasma Chemical Vapor Deposition
• Deposition of Hydrogen-Free Diamond-Like Carbon Film and Its Application to Field Emission Devices
• Deposition of Hydrogen-Free Diamond-Like Carbon Film and Its Application to Field Emission Devices
• Low Dielectric Constant Fluorinated Oxide Films Prepared by Remote Plasma Chemical Vapor Deposition
• Unusual Cases of Syringoma of the Forehead
• Spontaneous Resolution of a Full-Thickness Macular Hole in Proliferative Diabetic Retinopathy
• Expression of inducible nitric oxide synthase in thyroid neoplasms : Immunohistochemical and molecular analysis
• A Link-Disjoint Submesh for Processor Allocation in Mesh Computers
• Loss of Core Fucosylation of Low-Density Lipoprotein Receptor-Related Protein-1 Impairs Its Function, Leading to the Upregulation of Serum Levels of Insulin-Like Growth Factor-Binding Protein 3 in Fut8^ Mice
• Land Application of Alum Sludge from Water Purification Plant to Acid Mineral Soil Treated with Acidic Water
• Cyclization Effects of Pep1 and Its Antibody Bound Conformation for Inhibition of Autoimmune Disease Myasthenia Gravis
• Deposition and Characterization of Ta, TaN_x and Ta_4B Films for Next-Generation Lithography Mask Applications
• High Transmittance SiC Membrane Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition in Combination with Rapid Thermal Annealing
• Clinical usefulness of 18F-FDG PET-CT for patients with gallbladder cancer and cholangiocarcinoma
• Fabrication of Amorphous Silicon TFT by Atmospheric Pressure CVD
• The influence of ionic impurities on the Voltage Holding Ratio and Residual DC Voltage in LC cells
• The influence of ionic impurities on the Voltage Holding Ratio and Residual DC Voltage in LC cells.
• Effect of different anesthetic agents on oculocardiac reflex in pediatric strabismus surgery
• The Internalization and Metabolism of 3-Deoxyglucosone in Human Umbilical Vein Endothelial Cells
• Fabrication and Estimation of Characteristics for Nb-Silicide FEAs (第5回日韓台中情報ディスプレイ合同研究会(ASID '99)) -- (FED and EL Displays)
• Fabrication and estimation of characteristics for Nb-silicide FEAs
• Pituitary adenoma with rich folliculo-stellate cells and mucin-producing epithelia arising in a 2-year-old girl
• Interictal Epileptiform Discharges Relate to ^1H-MRS-detected Metabolic Abnormalities in Mesial Temporal Lobe Epilepsy
• Elastic fiber staining and cytokeratin 15 expression pattern in trichoepithelioma and basal cell carcinoma
• 'Swiss Cheese' Lymphangiectasia in a Case of Solitary Morphea Profunda
• Milia Arising in Herpes Zoster Scars
• Heterotopic Salivary Glands Simulating Bronchial Cleft Fistular in the Lower Neck
• Flexibility of Low Temperature Polycrystalline Silicon Thin-Film Transistor on Tungsten Foil
• A Real-Time Joint Source-Channel Coding Based on a Simplified Modeling of the Residual Video Packet Loss
• Mossbauer Studies on Exchange Interactions in CoFe_2O_4 : Magnetism
• BONE REGENERATIVE POLYMERIC BIOMATERIALS WITH DRUG RELEASING FUNCTION
• Effect of Ganoderma lucidum on the Quality and Functionality of Korean Traditional Rice Wine, Yakju
• Investigation of Interface Formed between Top Electrodes and Epitaxial NiO Films for Bipolar Resistance Switching
• Insulin Sensitizing and Insulinotropic Action of Berberine from Cortidis Rhizoma(Medicinal Chemistry)
• Patterned Single-Wall Carbon Nanotube Transparent Conducting Films for Liquid Crystal Switching Electrodes
• Decreased bone mineral density of femur in patients with cervical cancer
• Poliosis Circumscripta Associated with Neurofibroma
• DLC 〓〓〓 〓〓 〓〓〓〓〓-〓 〓〓〓〓〓〓〓 〓〓 〓〓 〓〓〓 〓〓〓 〓〓 〓〓
• Chronic Graft-versus-Host Disease of the Liver Presenting as an Acute Hepatitis following Nonmyeloablative Hematopoietic Stem Cell Transplantation
• Ex Vivo Expansion of Human Umbilical Cord Blood CD34+ Cells in a Collagen Bead-Containing 3-Dimensional Culture System
• Liquid Crystal Photoalignment Using Soluble Photosensitive Polyimide
• Trends in the incidence of benign pathological lesions at partial nephrectomy for presumed renal cell carcinoma in renal masses on preoperative computed tomography imaging : A single institute experience with 290 consecutive patients
• Low Temperature Poly-Si TFT by Lamp Annealing
• Prospective randomized pilot trial comparing closed suction drainage and gravity drainage of the pancreatic duct in pancreaticojejunostomy
• Idiopathic Acquired Anhidrosis : Reversible Generalized Anhidrosis after Sunstroke
• A Case of Perineal Schwannoma Resembling a Skin Tag
• Calcium and Epidermal Barrier
• HIGH PERFORMANCE A-SI TFT PRODUCED BY RP-CVD
• A Practical Code Rate Decision Scheme Based on Playable Bitrate Model for Error-Resilient Joint Source-Channel Coding
• ED2000-76 / SDM2000-76 SMC of a-Si in an electric field and its application to TFTs
• EFFECT OF Cl INCORPORATION ON THE PERFORMANCE OF AMORPHOUS SILICON THIN FILM TRANSISTOR
• TFT Technologies for Flexible Displays
• Cell Gap-Dependent Transmittance Characteristic in a Fringe Field-Driven Homogeneously Aligned Liquid Crystal Cell with Positive Dielectric Anisotropy
• Optical Modeling and Analysis of Organic Solar Cells with Coherent Multilayers and Incoherent Glass Substrate Using Generalized Transfer Matrix Method
• Liquid Crystal Alignment Capability by the UV Alignment Method in a-C:H Thin Films

もっと見る 閉じる

スポンサーリンク